{"id":203,"date":"2021-02-25T22:23:54","date_gmt":"2021-02-25T13:23:54","guid":{"rendered":"https:\/\/www.ofc.titech.ac.jp\/?page_id=203"},"modified":"2023-06-05T09:59:32","modified_gmt":"2023-06-05T00:59:32","slug":"micro-process","status":"publish","type":"page","link":"https:\/\/www.ofc.titech.ac.jp\/en\/department\/micro-process\/","title":{"rendered":"Semiconductor and MEMS Processing Division"},"content":{"rendered":"<!-- Banner -->\r\n<div id=\"topBanner\" class=\"carousel slide\" data-ride=\"carousel\">\r\n<div class=\"carousel-inner\">\r\n<div class=\"carousel-item active\"><img decoding=\"async\" class=\"d-block w-100 regular\" src=\"\/wp-content\/uploads\/2021\/03\/hd.png\" alt=\"Banner\" \/>\r\n<div class=\"banner-text breadcrumb-wrapper\">\r\n<div class=\"max-width\">\t\t\t<!-- Flexy Breadcrumb -->\r\n\t\t\t<div class=\"fbc fbc-page\">\r\n\r\n\t\t\t\t<!-- Breadcrumb wrapper -->\r\n\t\t\t\t<div class=\"fbc-wrap\">\r\n\r\n\t\t\t\t\t<!-- Ordered list-->\r\n\t\t\t\t\t<ol class=\"fbc-items\" itemscope itemtype=\"https:\/\/schema.org\/BreadcrumbList\">\r\n\t\t\t\t\t\t            <li itemprop=\"itemListElement\" itemscope itemtype=\"https:\/\/schema.org\/ListItem\">\r\n                <span itemprop=\"name\">\r\n                    <!-- Home Link -->\r\n                    <a itemprop=\"item\" href=\"https:\/\/www.ofc.titech.ac.jp\/en\">\r\n                    \r\n                        Home                    <\/a>\r\n                <\/span>\r\n                <meta itemprop=\"position\" content=\"1\" \/><!-- Meta Position-->\r\n             <\/li><li><span class=\"fbc-separator\"> > <\/span><\/li><li class=\"active\" itemprop=\"itemListElement\" itemscope itemtype=\"https:\/\/schema.org\/ListItem\"><span itemprop=\"name\" title=\"Semiconductor and MEMS Processing Division\">Semiconductor and MEMS Processing Division<\/span><meta itemprop=\"position\" content=\"2\" \/><\/li>\t\t\t\t\t<\/ol>\r\n\t\t\t\t\t<div class=\"clearfix\"><\/div>\r\n\t\t\t\t<\/div>\r\n\t\t\t<\/div>\r\n\t\t\t<\/div>\r\n<\/div>\r\n<h1 class=\"banner-title\">Divisions<\/h1>\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n<!-- Facility Wrapper -->\r\n<div id=\"overview-wrapper\" class=\"max-width\"><ul id=\"toggle-list\" class=\"no-list-arrow\">\n \t<li class=\"has-ref\" data-href=\"list-1\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/overview\/#greeting\"><span>Greeting<\/span><\/a><\/li>\n \t<li class=\"has-ref\" data-href=\"list-2\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/overview\/#about\"><span>About CFC<\/span><\/a><\/li>\n \t<li class=\"has-ref\" data-href=\"list-3\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/core_facility\/\"><span>Core Facility Program<\/span><\/a><\/li>\n \t<li class=\"has-sublist\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/department\/\">\n \t<span data-href=\"list-4\">Divisions<\/span><\/a>\n<ul class=\"sublist\">\n \t<li class=\"has-ref\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/department\/research-infrastructure\/\"><span>Research Infrastructure Strategy Office<\/span><\/a><\/li>\n \t<li class=\"has-ref\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/department\/tc-promo\/\"><span>TC College Promotion Office<\/span><\/a><\/li>\n \t<li class=\"has-ref\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/department\/design-production\/\"><span>Design and Manufacturing Division<\/span><\/a><\/li>\n \t<li class=\"has-ref\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/department\/analysis\/\"><span>Materials Analysis Division<\/span><\/a><\/li>\n \t<li class=\"has-ref\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/department\/education\/\"><span>Educational Support Division<\/span><\/a><\/li>\n \t<li class=\"has-ref\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/department\/info-infrastructure\/\"><span>ICT Support Division<\/span><\/a><\/li>\n \t<li class=\"has-ref\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/department\/safety-radiation\/\"><span>Safety and Radiation Management Division<\/span><\/a><\/li>\n \t<li class=\"has-ref\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/department\/bio-mat\/\"><span>\u30d0\u30a4\u30aa\u90e8\u9580\uff08\u65e7\uff09<\/span><\/a><\/li>\n \t<li class=\"has-ref\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/department\/micro-process\/\"><span>Semiconductor and MEMS Processing Division<\/span><\/a><\/li>\n \t<li class=\"has-ref\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/department\/facility-st\/\"><span>Facility Station Division<\/span><\/a><\/li>\n \t<li class=\"has-ref\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/department\/equipment-shared\/\"><span>Equipment sharing promotion group<\/span><\/a><\/li>\n \t<li class=\"has-ref\" data-href=\"list-5\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/integrated-equipment-shared\/\"><span>Integrated Facility Sharing<\/span><\/a><\/li>\n<\/ul><\/li>\n<\/ul>\r\n<ul id=\"toggle-content\">\r\n \t<li class=\"item-list\">\r\n<div class=\"list-content mb20 img-grid-content\">\r\n<h2 class=\"title\">Semiconductor and MEMS Processing Division<\/h2>\r\n<div class=\"inner-content\">\r\n<div class=\"img-inner text-center\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-501\" src=\"https:\/\/www.ofc.titech.ac.jp\/wp-content\/uploads\/2021\/03\/dep7.png\" alt=\"\" width=\"188\" height=\"110\" srcset=\"https:\/\/www.ofc.titech.ac.jp\/wp-content\/uploads\/2021\/03\/dep7.png 188w, https:\/\/www.ofc.titech.ac.jp\/wp-content\/uploads\/2021\/03\/dep7-16x9.png 16w\" sizes=\"auto, (max-width: 188px) 100vw, 188px\" \/><\/div>\r\n<div class=\"img-content\">\r\n\r\nThis division was organized with the mission of research support for the development of integrated systems using semiconductor processes and MEMS (Micro Electro Mechanical Systems). This department focuses on \"vacuum technology,\" \"plasma process technology,\" and \"electron beam technology,\" focusing on the evaluation of semiconductor optical \/ electronic devices and MEMS devices, and materials related to these, and \"requests research support from the laboratory. We support research from both \"based work\" and \"in charge of equipment in common facilities\".\r\n\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n<div class=\"list-content mb20 img-grid-content\">\r\n<h2 class=\"title\">Work Description<\/h2>\r\n<div class=\"inner-content full-content\">\r\n\r\nPlasma process technology and lithography technology<br \/>\r\n- Device manufacture support<br \/>\r\n- Observation of minute structures using electron microscope<br \/>\r\n- High-resolution calculation measurement using stylus profilemeter<br \/>\r\n- Support with vacuum technology<br \/>\r\n- Technical advice about research experiments<br \/>\r\n- Development of new technologies with semiconductor processes<br \/>\r\n<div class=\"text-right col-sm-12\"><a href=\"https:\/\/www.ofc.titech.ac.jp\/en\/division\/semimem\/\"><img decoding=\"async\" class=\"nkp-left-arrow\" src=\"\/wp-content\/uploads\/2021\/03\/22934eb7511e484293d146dc20780370.png\" alt=\"\" \/> Division home page <img decoding=\"async\" class=\"nkp-right-arrow\" src=\"\/wp-content\/uploads\/2021\/03\/a982b5e565e43b686677fdb4e1a4a688.png\" alt=\"\" \/><\/a><\/div>\r\n<\/div>\r\n<\/div><\/li>\r\n<\/ul>\r\n<\/div>","protected":false},"excerpt":{"rendered":"\u90e8\u9580\u306b\u3064\u3044\u3066 \u30de\u30a4\u30af\u30ed\u30d7\u30ed\u30bb\u30b9\u90e8\u9580 \u672c\u90e8\u9580\u306f\uff0c\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308b\u96c6\u7a4d\u30b7\u30b9\u30c6\u30e0\u53ca\u3073\u304a\u3088\u3073MEMS (Micro Electro Mechanical Systems) \u958b\u767a\u306e\u305f\u3081\u306e\u7814\u7a76\u652f\u63f4\u3092\u4f7f\u547d\u3068\u3057\u3066\u7d44\u7e54\u3055\u308c\u307e\u3057\u305f\u3002 \u672c&#8230;","protected":false},"author":1,"featured_media":0,"parent":35,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"template\/overview_page_11.php","meta":{"footnotes":""},"class_list":["post-203","page","type-page","status-publish","hentry"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.ofc.titech.ac.jp\/en\/wp-json\/wp\/v2\/pages\/203","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.ofc.titech.ac.jp\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.ofc.titech.ac.jp\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.ofc.titech.ac.jp\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.ofc.titech.ac.jp\/en\/wp-json\/wp\/v2\/comments?post=203"}],"version-history":[{"count":22,"href":"https:\/\/www.ofc.titech.ac.jp\/en\/wp-json\/wp\/v2\/pages\/203\/revisions"}],"predecessor-version":[{"id":8360,"href":"https:\/\/www.ofc.titech.ac.jp\/en\/wp-json\/wp\/v2\/pages\/203\/revisions\/8360"}],"up":[{"embeddable":true,"href":"https:\/\/www.ofc.titech.ac.jp\/en\/wp-json\/wp\/v2\/pages\/35"}],"wp:attachment":[{"href":"https:\/\/www.ofc.titech.ac.jp\/en\/wp-json\/wp\/v2\/media?parent=203"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}