Divisions

This division was organized with the mission of research support for the development of integrated systems using semiconductor processes and MEMS (Micro Electro Mechanical Systems). This department focuses on "vacuum technology," "plasma process technology," and "electron beam technology," focusing on the evaluation of semiconductor optical / electronic devices and MEMS devices, and materials related to these, and "requests research support from the laboratory. We support research from both "based work" and "in charge of equipment in common facilities".